The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8461029 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 11, 2013

Filed:

Aug. 03, 2012
Applicants:

Fengyi Jiang, Nanchang, CN;

LI Wang, Nanchang, CN;

Chunlan MO, Nanchang, CN;

Wenqing Fang, Nanchang, CN;

Inventors:

Fengyi Jiang, Nanchang, CN;

Li Wang, Nanchang, CN;

Chunlan Mo, Nanchang, CN;

Wenqing Fang, Nanchang, CN;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/0254 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for fabricating quantum wells by using indium gallium nitride (InGaN) semiconductor material includes fabricating a potential well on a layered group III-V nitride structure at a first predetermined temperature in a reactor chamber by injecting into the reactor chamber an In precursor gas and a Ga precursor gas. The method further includes, subsequent to the fabrication of the potential well, terminating the Ga precursor gas, maintaining a flow of the In precursor gas, and increasing the temperature in the reactor chamber to a second predetermined temperature while adjusting the In precursor gas flow rate from a first to a second flow rate. In addition, the method includes annealing and stabilizing the potential well at the second predetermined temperature while maintaining the second flow rate. The method also includes fabricating a potential barrier above the potential well at the second predetermined temperature while resuming the Ga precursor gas.


Find Patent Forward Citations

Jiang, Fengyi. (2013). Method for fabricating ingan-based multi-quantum well layers (U.S. Patent No. 8461029). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8461029

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