The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2013
Filed:
Apr. 20, 2010
Ryoichi Matsuoka, Yotsukaido, JP;
Akihiro Onizawa, Mito, JP;
Akiyuki Sugiyama, Hitachinaka, JP;
Hidetoshi Morokuma, Hitachinaka, JP;
Yasutaka Toyoda, Hitachi, JP;
Ryoichi Matsuoka, Yotsukaido, JP;
Akihiro Onizawa, Mito, JP;
Akiyuki Sugiyama, Hitachinaka, JP;
Hidetoshi Morokuma, Hitachinaka, JP;
Yasutaka Toyoda, Hitachi, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Mutual compatibility is established between the measurement with a high magnification and the measurement in a wide region. A pattern measurement apparatus is proposed which adds identification information to each of fragments that constitute a pattern within an image obtained by the SEM, and which stores the identification information in a predetermined storage format. Here, the identification information is added to each fragment for distinguishing between one fragment and another fragment. According to the above-described configuration, it turns out that the identification information is added to each fragment on the SEM image which has possessed no specific identification information originally. As a result, it becomes possible to implement the SEM-image management based on the identification information.