The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2013
Filed:
Nov. 03, 2009
Erik Roelof Loopstra, Eindhoven, NL;
Vadim Yevgenyevich Banine, Deume, NL;
Gerardus Hubertus Petrus Maria Swinkels, Eindhoven, NL;
Erik Petrus Buurman, Veldhoven, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Vadim Yevgenyevich Banine, Deume, NL;
Gerardus Hubertus Petrus Maria Swinkels, Eindhoven, NL;
Erik Petrus Buurman, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A source configured to generate EUV radiation includes a fuel droplet generator configured to deliver a droplet of fuel to an interaction point, optics configured to deliver fuel vaporizing and exciting radiation to the interaction point to generate a plasma, and a collector arranged to collect EUV radiation emitted by the plasma. The optics are arranged such that in use the fuel vaporizing and exciting radiation is incident upon more than one side of the fuel droplet at the interaction point.