The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2013
Filed:
Aug. 28, 2009
Takashi Hiroi, Yokohama, JP;
Yasuhiro Gunji, Hitachiota, JP;
Hiroshi Miyai, Hitachi, JP;
Masaaki Nojiri, Hitachinaka, JP;
Takashi Hiroi, Yokohama, JP;
Yasuhiro Gunji, Hitachiota, JP;
Hiroshi Miyai, Hitachi, JP;
Masaaki Nojiri, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
There is provided a substrate inspection device which uses a charged particle beam and is capable of more quickly extracting a defect candidate than ever before. The configuration of the substrate inspection device is such that a substrate having a circuit pattern is irradiated with a primary charged particle beam, the substrate is moved at a constant speed or at an increasing or a decreasing speed, a position resulting from the movement is monitored, the position of irradiation with the primary charged particle beam is controlled according to the coordinates of the substrate, an image in a partial region on the substrate is captured at a speed lower than the velocity of the movement, a defect candidate is detected based on the captured image, and the detected defect candidate is displayed in a map format.