The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2013
Filed:
Oct. 14, 2010
Luigi Scaccabarozzi, Valkenswaard, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Christian Wagner, Duizel, NL;
Luigi Scaccabarozzi, Valkenswaard, NL;
Vadim Yevgenyevich Banine, Deurne, NL;
Christian Wagner, Duizel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A detector detects radiation from a mask to form an image, but the focal plane of the image is in front of the mask. Any particles arranged on the mask will be in focus. However, the pattern on the mask will be out of focus. It is therefore possible to detect the existence and location of particles on a mask having an arbitrary pattern. The depth of field of the detector is small and the focal plane is no further from the surface of the patterning device than two times the depth of field.