The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2013
Filed:
Apr. 21, 2011
Stephen R. Hooper, Mesa, AZ (US);
Dwight L. Daniels, Phoenix, AZ (US);
James D. Macdonald, Chandler, AZ (US);
William G. Mcdonald, Payson, AZ (US);
Chunlin C. Xia, Phoenix, AZ (US);
Stephen R. Hooper, Mesa, AZ (US);
Dwight L. Daniels, Phoenix, AZ (US);
James D. MacDonald, Chandler, AZ (US);
William G. McDonald, Payson, AZ (US);
Chunlin C. Xia, Phoenix, AZ (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
Apparatus and related fabrication methods are provided for a sensor device. The sensor device includes a sensor structure including a first portion having a sensing arrangement formed thereon and a second structure. A sealing structure is interposed between the sensor structure and the second structure, wherein the sealing structure surrounds the first portion of the sensor structure. The sealing structure establishes a fixed reference pressure on a first side of the first portion, and an opposing side of the first portion is exposed to an ambient pressure.