The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2013
Filed:
Sep. 25, 2007
Christopher Hess, San Carlos, CA (US);
John Kibarian, Los Altos Hills, CA (US);
Amit Joag, Sunnyvale, CA (US);
Abdul Mobeen Mohammed, Santa Clara, CA (US);
Ben Shieh, Sunnyvale, CA (US);
David Stashower, San Jose, CA (US);
Christopher Hess, San Carlos, CA (US);
John Kibarian, Los Altos Hills, CA (US);
Amit Joag, Sunnyvale, CA (US);
Abdul Mobeen Mohammed, Santa Clara, CA (US);
Ben Shieh, Sunnyvale, CA (US);
David Stashower, San Jose, CA (US);
PDF Solutions, Inc., San Jose, CA (US);
Abstract
A Characterization Vehicle (CV) and a method for forming it which yields a gain in efficiency for IC yield ramp improvements by enabling faster learning cycles and diagnosis while reducing costs. A plurality of SF experiments are combined into a single full flow mask set with many inline testing points. Smaller pads are arranged in a way supporting testing of interleaved pad frames, parallel testing, and the usage of stacked test structures, or Devices Under Test (DUT's).