The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2012
Filed:
Aug. 18, 2009
Fumio Kuriyama, Tokyo, JP;
Rei Kiumi, Tokyo, JP;
Nobutoshi Saito, Tokyo, JP;
Takashi Takemura, Tokyo, JP;
Masaaki Kimura, Tokyo, JP;
Sachiko Takeda, Tokyo, JP;
Yugang Guo, Tokyo, JP;
Fumio Kuriyama, Tokyo, JP;
Rei Kiumi, Tokyo, JP;
Nobutoshi Saito, Tokyo, JP;
Takashi Takemura, Tokyo, JP;
Masaaki Kimura, Tokyo, JP;
Sachiko Takeda, Tokyo, JP;
Yugang Guo, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A plating apparatus has a steam treatment chamber configured to perform a steam treatment using steam on a surface of a substrate, and a plating chamber configured to plate the surface of the substrate subjected to the steam treatment. The plating apparatus also has an acid treatment chamber configured to bring the surface of the substrate subjected to the steam treatment into contact with an acid liquid. The plating apparatus includes a frame housing the steam treatment chamber, the acid treatment chamber, and the plating chamber.