The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2012
Filed:
Feb. 24, 2012
Akira Hamamatsu, Chiba, JP;
Yoshimasa Oshima, Yokohama, JP;
Shunji Maeda, Yokohama, JP;
Hisae Shibuya, Chigasaki, JP;
Yuta Urano, Yokohama, JP;
Toshiyuki Nakao, Yokohama, JP;
Shigenobu Maruyama, Oiso, JP;
Akira Hamamatsu, Chiba, JP;
Yoshimasa Oshima, Yokohama, JP;
Shunji Maeda, Yokohama, JP;
Hisae Shibuya, Chigasaki, JP;
Yuta Urano, Yokohama, JP;
Toshiyuki Nakao, Yokohama, JP;
Shigenobu Maruyama, Oiso, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An inspecting method and apparatus for inspecting a substrate surface includes application of a light to the substrate surface, detection of scattered light or reflected light from the substrate surface due to the applied light at a plurality of positions to obtain a plurality of electrical signals, extraction of a signal in a mutually different frequency band from each of the plurality of electrical signals, and calculation of a value regarding a state of film of the substrate through an arithmetical operation process of a plurality of extracted signals in the frequency bands.