The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2012
Filed:
Jan. 17, 2007
Masahiko Ogino, Hitachi, JP;
Akihiro Miyauchi, Hitachi, JP;
Takashi Ando, Hitachi, JP;
Chiseki Haginoya, Tokyo, JP;
Susumu Komoriya, Tokorozawa, JP;
Yasunari Sohda, Kawasaki, JP;
Souichi Katagiri, Kodaira, JP;
Hiroya Ohta, Kokubunji, JP;
Yoshinori Nakayama, Sayama, JP;
Masahiko Ogino, Hitachi, JP;
Akihiro Miyauchi, Hitachi, JP;
Takashi Ando, Hitachi, JP;
Chiseki Haginoya, Tokyo, JP;
Susumu Komoriya, Tokorozawa, JP;
Yasunari Sohda, Kawasaki, JP;
Souichi Katagiri, Kodaira, JP;
Hiroya Ohta, Kokubunji, JP;
Yoshinori Nakayama, Sayama, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
In a mold in which a pattern is formed of a fine concavo-convex shape, two or more of alignment marks for determining a relative positional relation between a substrate and a mold are formed concentrically. Moreover, a damaged mark is identified from the positional information and shape of the respective marks, and an alignment between the mold and the substrate to which a resin film is applied is carried out excluding the damaged mark.