The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2012
Filed:
Dec. 14, 2006
Kars Zeger Troost, Waalre, NL;
Jason Douglas Hintersteiner, Norwalk, CT (US);
Patricius Aloysius Jacobus Tinnemans, Hapert, NL;
Wenceslao A. Cebuhar, Norwalk, CT (US);
Ronald P. Albright, Norwalk, CT (US);
Bernardo Kastrup, Eindhoven, NL;
Kars Zeger Troost, Waalre, NL;
Jason Douglas Hintersteiner, Norwalk, CT (US);
Patricius Aloysius Jacobus Tinnemans, Hapert, NL;
Wenceslao A. Cebuhar, Norwalk, CT (US);
Ronald P. Albright, Norwalk, CT (US);
Bernardo Kastrup, Eindhoven, NL;
ASML Holding N.V., Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An iterative method of producing optimized setpoint data for controlling the actuation of elements of an array of individually controllable elements in a maskless system and systems therefore. The optimization is based on estimation of a device structure that can utilizes one or more of the following factors: the low-pass characteristics of the projection system, the configuration of the illumination system, and the process window properties.