The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2012
Filed:
Feb. 24, 2011
Akiyuki Sugiyama, Hitachinaka, JP;
Hiroyuki Shindo, Hitachinaka, JP;
Hitoshi Komuro, Hitachinaka, JP;
Takumichi Sutani, Hitachinaka, JP;
Hidetoshi Morokuma, Hitachinaka, JP;
Akiyuki Sugiyama, Hitachinaka, JP;
Hiroyuki Shindo, Hitachinaka, JP;
Hitoshi Komuro, Hitachinaka, JP;
Takumichi Sutani, Hitachinaka, JP;
Hidetoshi Morokuma, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A pattern matching method which is capable of selecting a suitable measurement object pattern, even on a sample containing a periodic structure, and a computer program for making a computer execute the pattern matching. In a pattern matching method which executes matching between the design data-based first image of an object sample, and a second image, whether or not a periodic structure is included in a region to execute the matching is determined, so as to select a pattern, based on distance between an original point which is set in said image, and the pattern configuring said periodic structure, in the case where the periodic structure is included in said region, and to select a pattern based on coincidence of the pattern in said image, in the case where the periodic structure is not included in said region, and a computer program product.