The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2012
Filed:
Apr. 28, 2009
Wouter Anthon Soer, Nijmegen, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Tjarko Adriaan Rudolf Van Empel, Eindhoven, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Maarten Marinus Johannes Wilhelmus Van Herpen, Heesch, NL;
Wouter Anthon Soer, Nijmegen, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Tjarko Adriaan Rudolf Van Empel, Eindhoven, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Maarten Marinus Johannes Wilhelmus Van Herpen, Heesch, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A radiation source includes a radiation emitter configured to emit radiation, a collector configured to collect the radiation, and a contamination trap configured to trap contamination emitted by the radiation source. The contamination trap includes a plurality of foils that extend substantially radially, a first magnet ring configured to lie outside of an outer conical trajectory of radiation that is collected by the collector, and a second magnet ring configured to lie within the trajectory of radiation that is collected by the collector. The magnet rings are configured to provide a magnetic field that includes a component that is parallel to the foils.