The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2012
Filed:
Sep. 17, 2009
Gabor Toth, San Jose, CA (US);
Rudy Garcia, Union City, CA (US);
Mehran Nasser-ghodsi, Hamilton, MA (US);
Khashayar Shadman, Mountain View, CA (US);
Ming Lun Yu, Fremont, CA (US);
Stuart Friedman, Palo Alto, CA (US);
Gabor Toth, San Jose, CA (US);
Rudy Garcia, Union City, CA (US);
Mehran Nasser-Ghodsi, Hamilton, MA (US);
Khashayar Shadman, Mountain View, CA (US);
Ming Lun Yu, Fremont, CA (US);
Stuart Friedman, Palo Alto, CA (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
A defect may be characterized using primary radiation directed from a primary electron source to a measurement location on the sample. An electron energy analyzer may capture secondary electrons emitted from the measurement location in a focusing direction by an electron energy analyzer. A transverse focusing device may focus electrons emitted from the measurement location in a transverse direction that is perpendicular to the focusing direction.