The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 26, 2012
Filed:
Jul. 07, 2008
Applicants:
Babak Kadkhodayan, Pleasanton, CA (US);
Rajinder Dhindsa, San Jose, CA (US);
Anthony DE LA Llera, Fremont, CA (US);
Michael C. Kellogg, Pleasanton, CA (US);
Inventors:
Babak Kadkhodayan, Pleasanton, CA (US);
Rajinder Dhindsa, San Jose, CA (US);
Anthony de la Llera, Fremont, CA (US);
Michael C. Kellogg, Pleasanton, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/50 (2006.01); C23C 16/503 (2006.01);
U.S. Cl.
CPC ...
Abstract
A showerhead electrode includes inner and outer steps at an outer periphery thereof, the outer step cooperating with a clamp ring which mechanically attaches the electrode to a backing plate.
Published as:
JP3150053U; TWM366753U; DE202009009293U1; CN201341268Y; US2010000683A1; KR20100000514U; KR200454710Y1; US8206506B2; MY146761A;