The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 05, 2012
Filed:
Jan. 07, 2008
Allen Park, San Jose, CA (US);
Peter Rose, Boulder Creek, CA (US);
Ellis Chang, Saratoga, CA (US);
Brian Duffy, San Jose, CA (US);
Mark Mccord, Mountain View, CA (US);
Gordon Abbott, Pleasanton, CA (US);
Allen Park, San Jose, CA (US);
Peter Rose, Boulder Creek, CA (US);
Ellis Chang, Saratoga, CA (US);
Brian Duffy, San Jose, CA (US);
Mark McCord, Mountain View, CA (US);
Gordon Abbott, Pleasanton, CA (US);
KLA-Tencor Corp., San Jose, CA (US);
Abstract
Various methods and systems for using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions are provided. One computer-implemented method includes using electrical information for a device being fabricated on a wafer to perform one or more defect-related functions. The one or more defect-related functions include one or more post-mask, defect-related functions.