The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2012
Filed:
Jun. 16, 2010
Masaki Narushima, Nirasaki, JP;
Koichi Mori, Tokyo, JP;
Isao Yamada, Kobe, JP;
Noriaki Toyoda, Kobe, JP;
Masaki Narushima, Nirasaki, JP;
Koichi Mori, Tokyo, JP;
Isao Yamada, Kobe, JP;
Noriaki Toyoda, Kobe, JP;
Tokyo Electron Limited, Tokyo, JP;
Hyogo Prefecture, Hyogo, JP;
Abstract
A charged particle separation apparatus that separates ionized gas clusters is disclosed. The charged particle separation apparatus includes an electric field applying part including two electrodes across which electric voltage is applied in order to generate electric field between the two electrodes thereby deflecting a trajectory of the ionized gas cluster, the electrodes including one of an opening and a void; and a plate opening that allows the ionized gas cluster whose trajectory is deflected by the electric field applying part to go therethrough.