The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2012
Filed:
May. 15, 2007
Tsukasa Watanabe, Nirasaki, JP;
Naoki Shindo, Nirasaki, JP;
Koukichi Hiroshiro, Tosu, JP;
Yuji Kamikawa, Tosu, JP;
Tsukasa Watanabe, Nirasaki, JP;
Naoki Shindo, Nirasaki, JP;
Koukichi Hiroshiro, Tosu, JP;
Yuji Kamikawa, Tosu, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate cleaning method can uniformly removing particles from substrates at a high removing efficiency. The substrate cleaning method includes the steps of immersing substrates W in a cleaning liquid in a cleaning tank, and generating ultrasonic waves in the cleaning liquid contained in the cleaning tank. A region in the cleaning tank toward which the cleaning liquid is supplied is varied with respect to a vertical level in the step of generating ultrasonic waves in the cleaning liquid while the cleaning liquid is being supplied into the cleaning tank.