The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 27, 2012
Filed:
May. 22, 2009
Akira Hamamatsu, Chiba, JP;
Yoshimasa Oshima, Yokohama, JP;
Shunji Maeda, Yokohama, JP;
Hisae Shibuya, Chigasaki, JP;
Yuta Urano, Yokohama, JP;
Toshiyuki Nakao, Yokohama, JP;
Shigenobu Maruyama, Oiso, JP;
Akira Hamamatsu, Chiba, JP;
Yoshimasa Oshima, Yokohama, JP;
Shunji Maeda, Yokohama, JP;
Hisae Shibuya, Chigasaki, JP;
Yuta Urano, Yokohama, JP;
Toshiyuki Nakao, Yokohama, JP;
Shigenobu Maruyama, Oiso, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
To inspect a substrate such as a semiconductor substrate for surface roughness at high precision. The surface roughness of the substrate is measured in each frequency band of the surface roughness by applying a light to the substrate surface and detecting a scattered light or reflected light at a plurality of azimuth or elevation angles.