The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 2012
Filed:
Dec. 15, 2008
Jack Jau, Los Altos Hills, CA (US);
Zhongwei Chen, San Jose, CA (US);
Yi Xiang Wang, Fremont, CA (US);
Chung-shih Pan, Palo Alto, CA (US);
Joe Wang, Campbell, CA (US);
Xuedong Liu, Cupertino, CA (US);
Weiming Ren, San Jose, CA (US);
Wei Fang, Milpitas, CA (US);
Jack Jau, Los Altos Hills, CA (US);
Zhongwei Chen, San Jose, CA (US);
Yi Xiang Wang, Fremont, CA (US);
Chung-Shih Pan, Palo Alto, CA (US);
Joe Wang, Campbell, CA (US);
Xuedong Liu, Cupertino, CA (US);
Weiming Ren, San Jose, CA (US);
Wei Fang, Milpitas, CA (US);
Hermes-Microvision, Inc., Hsinchu, TW;
Abstract
An apparatus comprises an imaging unit to image a wafer to be reviewed, wherein imaging unit is the modified SORIL column. The modified SORIL column includes a focusing sub-system to do micro-focusing due to a wafer surface topology, wherein the focusing sub-system verifies the position of a grating image reflecting from the wafer surface to adjust the focus; and a surface charge control to regulate the charge accumulation due to electron irradiation during the review process, wherein the gaseous molecules are injected under a flood gun beam rather than under a primary beam. The modified SORIL column further includes a storage unit for storing wafer design database; and a host computer to manage defect locating, defect sampling, and defect classifying, wherein the host computer and storage unit are linked by high speed network.