The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 2012
Filed:
Jan. 08, 2010
Applicants:
Jochen Hetzler, Aalen, DE;
Frank Schillke, Aalen, DE;
Stefan Schulte, Aalen-Waldhausen, DE;
Rolf Freimann, Aalen, DE;
Bernd Doerband, Aalen, DE;
Inventors:
Jochen Hetzler, Aalen, DE;
Frank Schillke, Aalen, DE;
Stefan Schulte, Aalen-Waldhausen, DE;
Rolf Freimann, Aalen, DE;
Bernd Doerband, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G01B 11/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
Optical element having an optical surface, which optical surface is adapted to a non-spherical target shape, such that a long wave variation of the actual shape of the optical surface with respect to the target shape is limited to a maximum value of 0.2 nm, wherein the long wave variation includes only oscillations having a spatial wavelength equal to or larger than a minimum spatial wavelength of 10 mm.