The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2011
Filed:
May. 20, 2009
Marc Laverdiere, Wakefield, MA (US);
Robert F. Mcloughlin, Pelham, NH (US);
George Gonnella, Pepperell, MA (US);
Iraj Gashgaee, Waltham, MA (US);
Jennifer Marrs, Cornish, NH (US);
Marc Laverdiere, Wakefield, MA (US);
Robert F. McLoughlin, Pelham, NH (US);
George Gonnella, Pepperell, MA (US);
Iraj Gashgaee, Waltham, MA (US);
Jennifer Marrs, Cornish, NH (US);
Entegris, Inc., Chaska, MN (US);
Abstract
Fluid control apparatus including a proportional flow valve having a fluid inlet and a fluid outlet; a pneumatic proportional control valve in communication with the proportional flow valve for modulating the proportional flow valve; a frictional flow element having a frictional flow element fluid inlet in fluid communication with the fluid outlet of the proportional flow valve and having a frictional flow element fluid outlet spaced from the frictional flow element fluid inlet, an upstream pressure sensor; a downstream pressure sensor; and a controller in communication with the upstream pressure sensor, the downstream pressure sensor and the pneumatic proportional control valve.