The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2009

Filed:

Jul. 18, 2003
Applicants:

Marc Laverdiere, Wakefield, MA (US);

Robert F. Mcloughlin, Pelham, NH (US);

George Gonnella, Pepperell, MA (US);

Iraj Gashgaee, Waltham, MA (US);

Jennifer Marrs, Cornish, NY (US);

Inventors:

Marc Laverdiere, Wakefield, MA (US);

Robert F. McLoughlin, Pelham, NH (US);

George Gonnella, Pepperell, MA (US);

Iraj Gashgaee, Waltham, MA (US);

Jennifer Marrs, Cornish, NY (US);

Assignee:

Entegris, Inc., Chaska, MN (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D 7/06 (2006.01);
U.S. Cl.
CPC ...
Abstract

Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.


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