The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2013
Filed:
Nov. 21, 2011
Marc Laverdiere, Wakefield, MA (US);
Robert F. Mcloughlin, Pelham, NH (US);
George Gonnella, Pepperell, MA (US);
Iraj Gashgaee, Marlborough, MA (US);
Jennifer Marrs, Cornish, NH (US);
Marc Laverdiere, Wakefield, MA (US);
Robert F. McLoughlin, Pelham, NH (US);
George Gonnella, Pepperell, MA (US);
Iraj Gashgaee, Marlborough, MA (US);
Jennifer Marrs, Cornish, NH (US);
Entegris, Inc., Chaska, MN (US);
Abstract
A proportional fluid control valve with improved linearity and reduced hysteresis is disclosed. The valve allows for smooth, gentle flow of fluid in a substantially linear fashion, with minimal turns. Preferably the valve is pneumatically actuated. Where temperature is not an issue, the valve can be actuated by any suitable means, including stepper motors, linear motors, voice coils or other force actuators. A versatile molded valve body that requires fewer parts compared to a machined valve is disclosed. In one embodiment, the molded valve body is designed specifically for flow control and contains two sensor housings with carefully positioned flow paths to optimize the use of space. The sensor housing or housings can be separately formed as inserts, allowing installation in various orientations.