The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2011
Filed:
Mar. 04, 2009
Applicants:
Manfred Horstmann, Duerroehrsdorf-Dittersbach, DE;
Peter Javorka, Radeburg, DE;
Karsten Wieczorek, Dresden, DE;
Kerstin Ruttloff, Hainichen, DE;
Inventors:
Manfred Horstmann, Duerroehrsdorf-Dittersbach, DE;
Peter Javorka, Radeburg, DE;
Karsten Wieczorek, Dresden, DE;
Kerstin Ruttloff, Hainichen, DE;
Assignee:
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
Abstract
By incorporating nitrogen into the P-doped regions and N-doped regions of the gate electrode material prior to patterning the gate electrode structure, yield losses due to reactive wet chemical cleaning processes may be significantly reduced.