The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 06, 2011
Filed:
Apr. 27, 2009
Bruno W. Schueler, San Jose, CA (US);
David A. Reed, Belmont, CA (US);
Bruce H. Newcome, Sunnyvale, CA (US);
Jeffrey A. Moore, San Jose, CA (US);
Bruno W. Schueler, San Jose, CA (US);
David A. Reed, Belmont, CA (US);
Bruce H. Newcome, Sunnyvale, CA (US);
Jeffrey A. Moore, San Jose, CA (US);
Revera Incorporated, Santa Clara, CA (US);
Abstract
A method and a system for calibrating an X-ray photoelectron spectroscopy (XPS) measurement are described. The method includes using an X-ray beam to generate an XPS signal from a sample and normalizing the XPS signal with a measured or estimated flux of the X-ray beam. The system includes an X-ray source for generating an X-ray beam and a sample holder for positioning a sample in a pathway of the X-ray beam. A detector is included for collecting an XPS signal generated by bombarding the sample with the X-ray beam. Also included are a flux detector for determining a measured or estimated flux of the X-ray beam and a computing system for normalizing the XPS signal with the measured or estimated flux of the X-ray beam.