The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2011
Filed:
Oct. 31, 2007
Takashi Hiroi, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Chie Shishido, Yokohama, JP;
Aritoshi Sugimoto, Tokyo, JP;
Maki Tanaka, Yokohama, JP;
Hiroshi Miyai, Hitachi, JP;
Asahiro Kuni, Tokyo, JP;
Yasuhiko Nara, Hitachinaka, JP;
Takashi Hiroi, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Chie Shishido, Yokohama, JP;
Aritoshi Sugimoto, Tokyo, JP;
Maki Tanaka, Yokohama, JP;
Hiroshi Miyai, Hitachi, JP;
Asahiro Kuni, Tokyo, JP;
Yasuhiko Nara, Hitachinaka, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An apparatus for processing a defect candidate image, including: a scanning electron microscope for taking an enlarged image of a specimen by irradiating and scanning a converged electron beam onto the specimen and detecting charged particles emanated from the specimen by the irradiation; an image processor for processing the image taken by the scanning electron microscope to detect defect candidates on the specimen and classify the detected defect candidates into one of plural classes; a memory for storing output from the image processor including images of the detected defect candidates; and a display unit which displays information stored in the memory and an indicator, wherein the display unit displays a distribution of the detected and classified defect candidates in a map format by distinguishing by the classified class, and the display unit also displays an image of a defect candidate stored in the memory together with the map which is indicated on the map by the indicator.