The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2011
Filed:
Jun. 02, 2006
Erik Roelof Loopstra, Heeze, NL;
Arno Jan Bleeker, Westerhoven, NL;
Heine Melle Mulder, Veldhoven, NL;
Oscar Franciscus Jozephus Noordman, Eindhoven, NL;
Timotheus Franciscus Sengers, s-Hertogenbosch, NL;
Laurentius Catrinus Jorritsma, Helmond, NL;
Mark Trentelman, Heeswijk-Dinther, NL;
Gerrit Streutker, Eindhoven, NL;
Erik Roelof Loopstra, Heeze, NL;
Arno Jan Bleeker, Westerhoven, NL;
Heine Melle Mulder, Veldhoven, NL;
Oscar Franciscus Jozephus Noordman, Eindhoven, NL;
Timotheus Franciscus Sengers, s-Hertogenbosch, NL;
Laurentius Catrinus Jorritsma, Helmond, NL;
Mark Trentelman, Heeswijk-Dinther, NL;
Gerrit Streutker, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An illuminator for a lithographic apparatus includes a first illuminator channel, a second illuminator channel, a first switch device, an additional illuminator part and a second switch device. Each of the first and the second illuminator channel includes elements which are adjustable to provide a radiation beam with at least one desired property. The first switch device is configured to receive the radiation beam and arranged to direct the radiation beam between the first and second illuminator channels. The second switch device is arranged to receive the radiation beam from the first and second illuminator channels and direct the radiation beam through the additional illuminator part. The additional illuminator part includes elements which apply at least one additional desired property to the radiation beam.