The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2011
Filed:
Dec. 05, 2007
Christophe Fouquet, Sunnyvale, CA (US);
Gordon Abbott, Pleasanton, CA (US);
Ellis Chang, Saratoga, CA (US);
Zain K. Saidin, San Mateo, CA (US);
Christophe Fouquet, Sunnyvale, CA (US);
Gordon Abbott, Pleasanton, CA (US);
Ellis Chang, Saratoga, CA (US);
Zain K. Saidin, San Mateo, CA (US);
KLA-Tencor Corp., San Jose, CA (US);
Abstract
Various methods, designs, defect review tools, and systems for determining locations on a wafer to be reviewed during defect review are provided. One computer-implemented method includes acquiring coordinates of defects detected by two or more inspection systems. The defects do not include defects detected on the wafer. The method also includes determining coordinates of the locations on the wafer to be reviewed during the defect review by translating the coordinates of the defects into the coordinates on the wafer such that results of the defect review performed at the locations can be used to determine if the defects cause systematic defects on the wafer.