The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 22, 2011
Filed:
Oct. 31, 2007
Takashi Hiroi, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Chie Shishido, Yokohama, JP;
Aritoshi Sugimoto, Tokyo, JP;
Maki Tanaka, Yokohama, JP;
Hiroshi Miyai, Hitachi, JP;
Asahiro Kuni, Tokyo, JP;
Yasuhiko Nara, Hitachinaka, JP;
Takashi Hiroi, Yokohama, JP;
Masahiro Watanabe, Yokohama, JP;
Chie Shishido, Yokohama, JP;
Aritoshi Sugimoto, Tokyo, JP;
Maki Tanaka, Yokohama, JP;
Hiroshi Miyai, Hitachi, JP;
Asahiro Kuni, Tokyo, JP;
Yasuhiko Nara, Hitachinaka, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An apparatus for processing a defect candidate image, including: an imager for taking an enlarged image of a specimen; an image processor for processing the image taken by the imager to detect defect candidates existing on the specimen and classify the detected defect candidates into one of plural defect classes; a memory for storing information of the defect candidates including the images of the defect candidates and the classified defect class data outputted from the image processor; and a display unit having a display screen for displaying information stored in the memory, wherein the display unit displays an image of the defect candidates together with the defect class data stored in the memory and the displayed defect class data is changeable on the display screen, and the memory changes the stored defect class data of the displayed defect candidate to the changed defect class data.