The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2010
Filed:
Jul. 25, 2008
J. Martin Algots, San Diego, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Alexander I. Ershov, Escondido, CA (US);
William N. Partlo, Poway, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
Oscar Hemberg, Stockholm, SE;
Alexander N. Bykanov, San Diego, CA (US);
Dennis W. Cobb, Lake Arrowhead, CA (US);
J. Martin Algots, San Diego, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Alexander I. Ershov, Escondido, CA (US);
William N. Partlo, Poway, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
Oscar Hemberg, Stockholm, SE;
Alexander N. Bykanov, San Diego, CA (US);
Dennis W. Cobb, Lake Arrowhead, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
An EUV plasma formation target delivery system and method is disclosed which may comprise: a target droplet formation mechanism comprising a magneto-restrictive or electro-restrictive material, a liquid plasma source material passageway terminating in an output orifice; a charging mechanism applying charge to a droplet forming jet stream or to individual droplets exiting the passageway along a selected path; a droplet deflector intermediate the output orifice and a plasma initiation site periodically deflecting droplets from the selected path, a liquid target material delivery mechanism comprising a liquid target material delivery passage having an input opening and an output orifice; an electromotive disturbing force generating mechanism generating a disturbing force within the liquid target material, a liquid target delivery droplet formation mechanism having an output orifice; and/or a wetting barrier around the periphery of the output orifice.