The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2010
Filed:
Jul. 10, 2007
Olaf Hubertus Wilhelmus Van Bruggen, Schijndel, NL;
Marcel Koenraad Marie Baggen, Nuenen, NL;
Johannes Roland Dassel, Best, NL;
Remko Wakker, Eindhoven, NL;
Stoyan Nihtianov, Eindhoven, NL;
Frank Auer, Valkenswaard, NL;
Frits Van Der Meulen, Eindhoven, NL;
Patrick David Vogelsang, Eindhoven, NL;
Martinus Cornelis Reijnen, Tilburg, NL;
Tom Van Zutphen, Eindhoven, NL;
Olaf Hubertus Wilhelmus Van Bruggen, Schijndel, NL;
Marcel Koenraad Marie Baggen, Nuenen, NL;
Johannes Roland Dassel, Best, NL;
Remko Wakker, Eindhoven, NL;
Stoyan Nihtianov, Eindhoven, NL;
Frank Auer, Valkenswaard, NL;
Frits Van Der Meulen, Eindhoven, NL;
Patrick David Vogelsang, Eindhoven, NL;
Martinus Cornelis Reijnen, Tilburg, NL;
Tom Van Zutphen, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus having a stationary magnet motor to drive a support such as a substrate support or a patterning device support, may be provided with a measurement system to measure a position of the support in question, e.g., to provide a safety system to prevent a collision of the support with another part. The measurement system may be configured to measure a magnetic field strength of an alternating magnetic field generated by the magnet assembly of the stationary magnet motor, and/or measure generation of eddy currents in a metallic layer shielding the magnet assembly in combination with an inductance measurement of an electromagnet generating the alternating magnetic field causing the eddy currents, and/or measure light using an optical position sensitive sensor such as a CCD metric or linear photodiode positioned in a light plane emitted by an emitter.