The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2010
Filed:
Feb. 22, 2007
Akira Fujimura, Saratoga, CA (US);
Daisuke Hara, Yokohama, JP;
Katsuo Komuro, Ichikawa, JP;
Takashi Mitsuhashi, Fujisawa, JP;
Akira Fujimura, Saratoga, CA (US);
Daisuke Hara, Yokohama, JP;
Katsuo Komuro, Ichikawa, JP;
Takashi Mitsuhashi, Fujisawa, JP;
Cadence Design Systems, Inc., San Jose, CA (US);
Abstract
A method and system for dose correction of a particle beam writer is disclosed. The method and system includes reading a file of writing objects that includes dose intensity, calculating a rate of dose intensity change between adjacent writing objects, selecting a writing object that may need accuracy improvement of dose correction based on the rate of dose intensity change, and improving accuracy of the dose correction of the writing object that is selected and its adjacent objects.