The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 10, 2010
Filed:
Dec. 13, 2007
Arno Bleeker, Westerhoven, NL;
Wenceslao A. Cebuhar, Norwalk, CT (US);
Justin Kreuzer, Trumbull, CT (US);
Azat Latypov, Danbury, CT (US);
Yuli Vladimirsky, Weston, CT (US);
Arno Bleeker, Westerhoven, NL;
Wenceslao A. Cebuhar, Norwalk, CT (US);
Justin Kreuzer, Trumbull, CT (US);
Azat Latypov, Danbury, CT (US);
Yuli Vladimirsky, Weston, CT (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
A method and system are provided of using a patterning device. An exemplary method includes defining a first region on a surface, the first region being associated with a first element of the patterning device, defining a second region on the surface, the second region being associated with a second element of the patterning device, activating the first element to expose the overlapping region, and deactivating the second element when the first element is active. The first region and the second region overlap in an overlapping region.