The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 06, 2010
Filed:
Nov. 28, 2005
Kai-erik Elers, Helsinki, FI;
Suvi P. Haukka, Helsinki, FI;
Ville Antero Saanila, Helsinki, FI;
Sari Johanna Kaipio, Järvenpää, FI;
Pekka Juha Soininen, Espoo, FI;
Kai-Erik Elers, Helsinki, FI;
Suvi P. Haukka, Helsinki, FI;
Ville Antero Saanila, Helsinki, FI;
Sari Johanna Kaipio, Järvenpää, FI;
Pekka Juha Soininen, Espoo, FI;
ASM International N.V., Bilthoven, NL;
Abstract
The present method provides tools for growing conformal metal nitride, metal carbide and metal thin films, and nanolaminate structures incorporating these films, from aggressive chemicals. The amount of corrosive chemical compounds, such as hydrogen halides, is reduced during the deposition of transition metal, transition metal carbide and transition metal nitride thin films on various surfaces, such as metals and oxides. Getter compounds protect surfaces sensitive to hydrogen halides and ammonium halides, such as aluminum, copper, silicon oxide and the layers being deposited, against corrosion. Nanolaminate structures () incorporating metal nitrides, such as titanium nitride () and tungsten nitride (), and metal carbides, and methods for forming the same, are also disclosed.