The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 29, 2010
Filed:
Nov. 09, 2005
Da Chen, San Jose, CA (US);
Christophe Fouquet, Sunnyvale, CA (US);
Saibal Banerjee, Fremont, CA (US);
Santosh Bhattacharyya, San Jose, CA (US);
Joe Wang, Sunnyvale, CA (US);
Lian Yao, Woodridge, IL (US);
Mike Van Riet, Morgan Hill, CA (US);
Igor Germanenko, San Jose, CA (US);
Da Chen, San Jose, CA (US);
Christophe Fouquet, Sunnyvale, CA (US);
Saibal Banerjee, Fremont, CA (US);
Santosh Bhattacharyya, San Jose, CA (US);
Joe Wang, Sunnyvale, CA (US);
Lian Yao, Woodridge, IL (US);
Mike van Riet, Morgan Hill, CA (US);
Igor Germanenko, San Jose, CA (US);
KLA-Tencor Technologies Corp., Milpitas, CA (US);
Abstract
Methods, defect review tools, and systems for locating a defect in a defect review process are provided. One method includes acquiring one or more images and data from an inspection tool. The one or more images illustrate an area on a specimen in which a defect to be reviewed is located. The data indicates a position and features of the defect within the area. The method also includes acquiring one or more additional images of the specimen proximate the position of the defect indicated in the data using an imaging subsystem of a defect review tool. In addition, the method includes identifying a portion of the one or more additional images that corresponds to the one or more images. The method further includes determining a position of the defect within the portion of the one or more additional images using the data.