The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2010
Filed:
Apr. 20, 2005
Jun Koshiyama, Kawasaki, JP;
Kazumasa Wakiya, Kawasaki, JP;
Fumitake Kaneko, Kawasaki, JP;
Atsushi Miyamoto, Kawasaki, JP;
Hidekazu Tajima, Kawasaki, JP;
Yoshihiro Sawada, Kawasaki, JP;
Jun Koshiyama, Kawasaki, JP;
Kazumasa Wakiya, Kawasaki, JP;
Fumitake Kaneko, Kawasaki, JP;
Atsushi Miyamoto, Kawasaki, JP;
Hidekazu Tajima, Kawasaki, JP;
Yoshihiro Sawada, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kanagawa, JP;
Abstract
The invention provides a novel rinsing fluid which can convert an easily wettable resist pattern surface having a contact angle of 40° or below into one having a contact angle of 70° or above to inhibit pattern collapse effectively and thereby give high-quality products. The rinsing fluid consists of a solution containing at least one fluorine compound soluble in water or alcoholic solvents which is selected from among compounds represented by the general formula (I), those represented by the general formula (II), and those represented by the general formula: R'—COOH: wherein Rand Rare each optionally substituted Calkyl whose hydrogen atoms are partially or wholly replaced by fluorine, or Rand Rtogether with the SOgroups to which they are bonded and the nitrogen atom may form a five- or six-membered ring; Ris optionally substituted Calkyl whose hydrogen atoms are partially or wholly replaced by fluorine; m and n are each an integer of 2 or 3; and R′ is at least partially fluorinated alkyl having 8 to 20 carbon atoms.