The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2010
Filed:
Jan. 30, 2006
Erik Roelof Loopstra, Heeze, NL;
Adrianus Franciscus Petrus Engelen, Waalre, NL;
Bernardus Antonius Johannes Luttikhuis, Nuenen, NL;
Maria Johanna Agnes Rubingh, Eindhoven, NL;
Johannes Martinus Andreas Hazenberg, Wijchen, NL;
Laurentius Catrinus Jorritsma, Helmond, NL;
Johannes Wilhelmus DE Klerk, Eindhoven, NL;
Bernhard Geuppert, Aalen, DE;
Aart Adrianus Van Beuzekom, Eindhoven, NL;
Petrus Franciscus Wilhelmus Maria Mandigers, Valkenswaard, NL;
Franz Sorg, Aalen, DE;
Peter Deufel, Königsbronn, DE;
Peter Schaap, Eindhoven, NL;
Erik Roelof Loopstra, Heeze, NL;
Adrianus Franciscus Petrus Engelen, Waalre, NL;
Bernardus Antonius Johannes Luttikhuis, Nuenen, NL;
Maria Johanna Agnes Rubingh, Eindhoven, NL;
Johannes Martinus Andreas Hazenberg, Wijchen, NL;
Laurentius Catrinus Jorritsma, Helmond, NL;
Johannes Wilhelmus De Klerk, Eindhoven, NL;
Bernhard Geuppert, Aalen, DE;
Aart Adrianus Van Beuzekom, Eindhoven, NL;
Petrus Franciscus Wilhelmus Maria Mandigers, Valkenswaard, NL;
Franz Sorg, Aalen, DE;
Peter Deufel, Königsbronn, DE;
Peter Schaap, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A lithographic apparatus has an assembly to exchange optical elements in a pupil plane of its projection system. The optical elements may be pupil filters and may conform to the physical dimensions specified for a reticle standard, e.g. having sides substantially equal to 5, 6 or 9 inches.