The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2010
Filed:
Dec. 06, 2007
Dan Grossman, Herzelia, IL;
Moshe Langer, Nes-Ziona, IL;
Roman Kris, Jerusalem, IL;
Silviu Reinhorn, Mevaseret-Zion, IL;
Ron Naftali, Shoham, IL;
Haim Feldman, Ayalon, IL;
Dan Grossman, Herzelia, IL;
Moshe Langer, Nes-Ziona, IL;
Roman Kris, Jerusalem, IL;
Silviu Reinhorn, Mevaseret-Zion, IL;
Ron Naftali, Shoham, IL;
Haim Feldman, Ayalon, IL;
Applied Materials Israel, Ltd., Rehovot, IL;
Abstract
A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength. A probe beam at a probe wavelength irradiates the region so as to generate returning probe beam radiation from the region. The beams are scanned across the region at a scan rate. A detector receives the returning probe radiation, and forms an image of the region that corresponds to a resolution better than pump and probe Abbe limits of the optical system. Roles of the pump and probe beams may be alternated, and a modulation frequency of the pump beam may be changed, to produce more information. Information extracted from the probe signal can also differentiate between different materials on the region.