The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 22, 2009

Filed:

Apr. 18, 2005
Applicants:

Byung-jin Choi, Austin, TX (US);

Anshuman Cherala, Austin, TX (US);

Yeong-jun Choi, Cedar Park, TX (US);

Mario J. Meissl, Austin, TX (US);

Sidlgata V. Sreenivasan, Austin, TX (US);

Norman E. Schumaker, Austin, TX (US);

Xiaoming LU, Austin, TX (US);

Ian M. Mcmackin, Austin, TX (US);

Daniel A. Babbs, Austin, TX (US);

Inventors:

Byung-Jin Choi, Austin, TX (US);

Anshuman Cherala, Austin, TX (US);

Yeong-jun Choi, Cedar Park, TX (US);

Mario J. Meissl, Austin, TX (US);

Sidlgata V. Sreenivasan, Austin, TX (US);

Norman E. Schumaker, Austin, TX (US);

Xiaoming Lu, Austin, TX (US);

Ian M. McMackin, Austin, TX (US);

Daniel A. Babbs, Austin, TX (US);

Assignee:

Molecular Imprints, Inc., Austin, TX (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/469 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention is directed towards a method of separating a mold, included in a template, from a layer disposed on a substrate, the method including, inter alia, applying a separation force to the template to separate the template from the layer; and facilitating localized deformation in the substrate to reduce the separation force required to achieve separation.


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