The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2009
Filed:
Dec. 06, 2005
Tetsuji Togawa, Tokyo, JP;
Hiroshi Yoshida, Tokyo, JP;
Osamu Nabeya, Tokyo, JP;
Makoto Fukushima, Tokyo, JP;
Koichi Fukaya, Tokyo, JP;
Tetsuji Togawa, Tokyo, JP;
Hiroshi Yoshida, Tokyo, JP;
Osamu Nabeya, Tokyo, JP;
Makoto Fukushima, Tokyo, JP;
Koichi Fukaya, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A substrate holding device according to the present invention includes an elastic membrane to be brought into contact with a rear surface of a substrate, an attachment member for securing at least a portion of the elastic membrane, and a retainer ring for holding a peripheral portion of the substrate while in contact with the elastic membrane. The elastic membrane comprises at least one projecting portion, and the attachment member comprises at least one engagement portion engaging side surfaces of the at least one projecting portion of the elastic membrane. The elastic membrane further comprises bellows portions expandable in a pressing direction so as to allow the elastic membrane to press the substrate, and contractible along the pressing direction.