The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2009
Filed:
Aug. 27, 2004
Robert P. Meagley, Hillsboro, OR (US);
Michael Mcswiney, Hillsboro, OR (US);
Michael D. Goodner, Hillsboro, OR (US);
Robert Leet, Scottsdale, AZ (US);
Manish Chandhok, Portland, OR (US);
Robert P. Meagley, Hillsboro, OR (US);
Michael McSwiney, Hillsboro, OR (US);
Michael D. Goodner, Hillsboro, OR (US);
Robert Leet, Scottsdale, AZ (US);
Manish Chandhok, Portland, OR (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
A cap may be formed anisotropically over a photoresist feature. For example, a material, such as a polymer, may be coated over the photoresist feature. If the coated material is photoactive, the cap may be grown preferentially in the vertical direction, creating high aspect ratio structures in some embodiments of the present invention.