The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2009
Filed:
Jul. 06, 2006
Leonid Aizikovitch Sjmaenok, Vaals, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Josephus Jacobus Smits, Geldrop, NL;
Lambertus Adrianus Van Den Wildenberg, Geldrop, NL;
Alexander Alexandrovitch Schmidt, St. Petersburg, RU;
Arnoud Cornelis Wassink, Veldhoven, NL;
Eric Louis Willem Verpalen, Geldrop, NL;
Antonius Johannes Van DE Pas, Veldhoven, NL;
Paul Peter Anna Antonius Brom, Eindhoven, NL;
Leonid Aizikovitch Sjmaenok, Vaals, NL;
Vadim Yevgenyevich Banine, Helmond, NL;
Josephus Jacobus Smits, Geldrop, NL;
Lambertus Adrianus Van Den Wildenberg, Geldrop, NL;
Alexander Alexandrovitch Schmidt, St. Petersburg, RU;
Arnoud Cornelis Wassink, Veldhoven, NL;
Eric Louis Willem Verpalen, Geldrop, NL;
Antonius Johannes Van De Pas, Veldhoven, NL;
Paul Peter Anna Antonius Brom, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus includes a radiation system including a radiation source for the production of a radiation beam, and a contaminant trap arranged in a path of the radiation beam. The contaminant trap includes a plurality of foils or plates defining channels that are arranged substantially parallel to the direction of propagation of said radiation beam. The foils or plates can be oriented substantially radially with respect to an optical axis of the radiation beam. The contaminant trap can be provided with a gas injector which is configured to inject gas at least at two different positions directly into at least one of the channels of the contaminant trap.