The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2009
Filed:
Jan. 18, 2007
Yuya Suzuki, Hitachinaka, JP;
Takeo Kamino, Hitachinaka, JP;
Toshie Yaguchi, Omitama, JP;
Mitsuru Konno, Hitachinaka, JP;
Tsuyoshi Ohnishi, Hitachinaka, JP;
Yuya Suzuki, Hitachinaka, JP;
Takeo Kamino, Hitachinaka, JP;
Toshie Yaguchi, Omitama, JP;
Mitsuru Konno, Hitachinaka, JP;
Tsuyoshi Ohnishi, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A focused ion beam system capable of acquiring surface structure information, internal structure information, and internal composition information about a sample simultaneously from the same field of view of the sample. A method of sample preparation and observation employs such focused ion beam system to accurately set a sample processing position based on information about the structure and composition of the sample acquired from multiple directions of the sample, and to process and observe the sample. The system includes, in order to acquire the sample structure and composition information simultaneously, a secondary electron detector, a transmission electron detector, and an energy dispersive X-ray spectroscope or an electron energy loss spectroscope, and employs a stub having the sample rotating and tilting function. The method includes a marking process.