The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2009
Filed:
Jan. 20, 2004
Applicants:
Atsushi Miyamoto, Yokohama, JP;
Hirohito Okuda, Yokohama, JP;
Toshifumi Honda, Yokohama, JP;
Yuji Takagi, Kamakura, JP;
Takashi Hiroi, Yokohama, JP;
Inventors:
Atsushi Miyamoto, Yokohama, JP;
Hirohito Okuda, Yokohama, JP;
Toshifumi Honda, Yokohama, JP;
Yuji Takagi, Kamakura, JP;
Takashi Hiroi, Yokohama, JP;
Assignee:
Hitachi High-Technologies Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention provides a method of classifying defects wherein defects are detected in a first inspection machine. The detected defects are then reviewed by a second inspection machine. A sampling rate for review by the second inspection machine is determined by a defect classifier in the first inspection machine.