The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2009
Filed:
Nov. 20, 2006
Khurram Zafar, San Jose, CA (US);
Sagar Kekare, Plano, TX (US);
Ellis Chang, Saratoga, CA (US);
Allen Park, San Jose, CA (US);
Peter Rose, Boulder Creek, CA (US);
Khurram Zafar, San Jose, CA (US);
Sagar Kekare, Plano, TX (US);
Ellis Chang, Saratoga, CA (US);
Allen Park, San Jose, CA (US);
Peter Rose, Boulder Creek, CA (US);
KLA-Tencor Technologies Corp., Milpitas, CA (US);
Abstract
Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least similar. The method further includes storing results of the binning step in a storage medium.