The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2009
Filed:
Oct. 23, 2007
Eiichi Hazaki, Tsuchiura, JP;
Yasuhiro Mitsui, Fuchu, JP;
Takashi Furukawa, Sagamihara, JP;
Hiroshi Yanagita, Koganei, JP;
Susumu Kato, Hitachinaka, JP;
Osamu Satou, Hitachinaka, JP;
Osamu Yamada, Hitachinaka, JP;
Yoshikazu Inada, Hitachinaka, JP;
Eiichi Hazaki, Tsuchiura, JP;
Yasuhiro Mitsui, Fuchu, JP;
Takashi Furukawa, Sagamihara, JP;
Hiroshi Yanagita, Koganei, JP;
Susumu Kato, Hitachinaka, JP;
Osamu Satou, Hitachinaka, JP;
Osamu Yamada, Hitachinaka, JP;
Yoshikazu Inada, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.