The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2009
Filed:
Dec. 02, 2005
Applicants:
Michael Goldstein, Ridgefield, CT (US);
Manish Chandhok, Portland, OR (US);
Eric Panning, Pleasanton, CA (US);
Robert Bristol, Portland, OR (US);
Bryan J. Rice, Hillsboro, OR (US);
Inventors:
Michael Goldstein, Ridgefield, CT (US);
Manish Chandhok, Portland, OR (US);
Eric Panning, Pleasanton, CA (US);
Robert Bristol, Portland, OR (US);
Bryan J. Rice, Hillsboro, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
In an implementation, energy reaching the lower surface of a photoresist may be redirected back into the photoresist material. This may be done by, for example, reflecting and/or fluorescing the energy from a hardmask provided on the wafer surface back into the photoresist.