The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2009
Filed:
Sep. 20, 2007
Applicants:
Shunji Maeda, Yokohama, JP;
Kenji Oka, Yokohama, JP;
Yukihiro Shibata, Fujisawa, JP;
Minoru Yoshida, Yokohama, JP;
Chie Shishido, Yokohama, JP;
Yuji Takagi, Kamakura, JP;
Atsushi Yoshida, Yokohama, JP;
Kazuo Yamaguchi, Sagamihara, JP;
Inventors:
Shunji Maeda, Yokohama, JP;
Kenji Oka, Yokohama, JP;
Yukihiro Shibata, Fujisawa, JP;
Minoru Yoshida, Yokohama, JP;
Chie Shishido, Yokohama, JP;
Yuji Takagi, Kamakura, JP;
Atsushi Yoshida, Yokohama, JP;
Kazuo Yamaguchi, Sagamihara, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of inspecting patterns to detect a defect of the patterns by using information of a scattered diagram of brightness of said first and second images.