The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2009
Filed:
Sep. 21, 2005
Applicants:
Michio Hatano, Tokyo, JP;
Sukehiro Ito, Hitachinaka, JP;
Shinichi Tomita, Hitachinaka, JP;
Junichi Katane, Naka, JP;
Inventors:
Michio Hatano, Tokyo, JP;
Sukehiro Ito, Hitachinaka, JP;
Shinichi Tomita, Hitachinaka, JP;
Junichi Katane, Naka, JP;
Assignee:
Hitachi Science Systems, Ltd., Ibaraki-ken, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 47/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A scanning electron microscope includes an irradiation optical system for irradiating an electron beam to a sample; a sample holder for supporting the sample, arranged inside a sample chamber; at least one electric field supply electrode arranged around the sample holder; and an ion current detection electrode.